TurboDisc MaxBright® MHP™ GaN MOCVD Multi-Reactor System

The TurboDisc MaxBright® MHP™ GaN MOCVD Multi-Reactor System features a breakthrough in production efficiency performance. As the industry's most productive MOCVD system designed to manufacture high quality, high brightness light emitting diodes (LEDs), the MaxBright MHP provides as much as 20% within-wafer wavelength uniformity improvement, enhanced serviceability and a 15% increase in footprint efficiency as compared to the MaxBright. Higher yields are achieved from technology advancements that result in improved thermal and flow capability across all wafers. An improved layout configuration, including removable pumps and filters and a more compact footprint, enhances serviceability and accommodates various fab space requirements. The MaxBright MHP leverages Veeco’s production-proven Uniform FlowFlange® technology and automation expertise by combining multiple high throughput reactors in 2- or 4-reactor cluster architecture. The low maintenance TurboDisc platform requires minimal maintenance while maintaining the highest throughput for enhanced production efficiency. The MaxBright MHP extends Veeco’s efficiency leadership with higher yield, enhanced footprint efficiency and lower cost of ownership compared to the previous MaxBright.